6/18/2010	9:07:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/18/2010	9:07:16 AM	Recipe started at 9:07 AM
6/18/2010	9:07:16 AM	H2 valve closed
6/18/2010	9:07:16 AM	BCl3 valve closed
6/18/2010	9:07:16 AM	PH3 valve closed
6/18/2010	9:07:16 AM	SiCl4 pre valve closed
6/18/2010	9:07:16 AM	SiCl4 post valve closed
6/18/2010	9:07:16 AM	Main Vac valve closed
6/18/2010	9:07:16 AM	Bypass valve closed
6/18/2010	9:07:16 AM	Bubbler valve closed
6/18/2010	9:07:16 AM	Helium valve opened
6/18/2010	9:07:16 AM	Helium MFC set to  500.000000
6/18/2010	9:07:16 AM	H2 MFC set to  0.000000
6/18/2010	9:07:16 AM	BCl3 MFC set to  0.000000
6/18/2010	9:07:16 AM	PHl3 MFC set to  0.000000
6/18/2010	9:07:16 AM	SiCl4 MFC set to  0.000000
6/18/2010	9:07:16 AM	Bypass solenoid MFC set to  0.000000
6/18/2010	9:07:16 AM	Tube furnace set to 0
6/18/2010	9:08:36 AM	Helium valve closed
6/18/2010	9:08:36 AM	H2 valve closed
6/18/2010	9:08:36 AM	BCl3 valve closed
6/18/2010	9:08:36 AM	PH3 valve closed
6/18/2010	9:08:36 AM	SiCl4 pre valve closed
6/18/2010	9:08:36 AM	SiCl4 post valve closed
6/18/2010	9:08:36 AM	Main Vac valve closed
6/18/2010	9:08:36 AM	Bypass valve closed
6/18/2010	9:08:36 AM	Bubbler valve closed
6/18/2010	9:08:36 AM	Helium MFC set to  0.000000
6/18/2010	9:08:36 AM	H2 MFC set to  0.000000
6/18/2010	9:08:36 AM	BCl3 MFC set to  0.000000
6/18/2010	9:08:36 AM	PHl3 MFC set to  0.000000
6/18/2010	9:08:36 AM	SiCl4 MFC set to  0.000000
6/18/2010	9:08:36 AM	Bypass solenoid MFC set to  0.000000
6/18/2010	9:08:36 AM	Tube furnace set to 0
6/18/2010	9:08:36 AM	Run finished at 9:08 AM
6/18/2010	9:08:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/18/2010	9:21:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/18/2010	9:21:14 AM	Recipe started at 9:21 AM
6/18/2010	9:21:14 AM	Helium valve closed
6/18/2010	9:21:14 AM	H2 valve closed
6/18/2010	9:21:14 AM	BCl3 valve closed
6/18/2010	9:21:14 AM	PH3 valve closed
6/18/2010	9:21:14 AM	SiCl4 pre valve closed
6/18/2010	9:21:14 AM	SiCl4 post valve closed
6/18/2010	9:21:14 AM	Main Vac valve closed
6/18/2010	9:21:14 AM	Bubbler valve closed
6/18/2010	9:21:14 AM	Bypass valve opened
6/18/2010	9:21:14 AM	Helium MFC set to  0.000000
6/18/2010	9:21:14 AM	H2 MFC set to  0.000000
6/18/2010	9:21:14 AM	BCl3 MFC set to  0.000000
6/18/2010	9:21:14 AM	PHl3 MFC set to  0.000000
6/18/2010	9:21:14 AM	SiCl4 MFC set to  0.000000
6/18/2010	9:21:14 AM	Bypass solenoid MFC set to  0.000000
6/18/2010	9:21:14 AM	Tube furnace set to 0
6/18/2010	9:22:02 AM	Helium valve closed
6/18/2010	9:22:02 AM	H2 valve closed
6/18/2010	9:22:02 AM	BCl3 valve closed
6/18/2010	9:22:02 AM	PH3 valve closed
6/18/2010	9:22:02 AM	SiCl4 pre valve closed
6/18/2010	9:22:02 AM	SiCl4 post valve closed
6/18/2010	9:22:02 AM	Bubbler valve closed
6/18/2010	9:22:02 AM	Main Vac valve opened
6/18/2010	9:22:02 AM	Bypass valve opened
6/18/2010	9:22:02 AM	Helium MFC set to  0.000000
6/18/2010	9:22:02 AM	H2 MFC set to  0.000000
6/18/2010	9:22:02 AM	BCl3 MFC set to  0.000000
6/18/2010	9:22:02 AM	PHl3 MFC set to  0.000000
6/18/2010	9:22:02 AM	SiCl4 MFC set to  0.000000
6/18/2010	9:22:02 AM	Bypass solenoid MFC set to  0.000000
6/18/2010	9:22:02 AM	Tube furnace set to 0
6/18/2010	9:22:02 AM	Run finished at 9:22 AM
6/18/2010	9:22:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/18/2010	9:26:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/18/2010	9:26:09 AM	Recipe started at 9:26 AM
6/18/2010	9:26:09 AM	H2 valve closed
6/18/2010	9:26:09 AM	BCl3 valve closed
6/18/2010	9:26:09 AM	PH3 valve closed
6/18/2010	9:26:09 AM	SiCl4 pre valve closed
6/18/2010	9:26:09 AM	SiCl4 post valve closed
6/18/2010	9:26:09 AM	Main Vac valve closed
6/18/2010	9:26:09 AM	Bypass valve closed
6/18/2010	9:26:09 AM	Bubbler valve closed
6/18/2010	9:26:09 AM	Helium valve opened
6/18/2010	9:26:09 AM	Helium MFC set to  500.000000
6/18/2010	9:26:09 AM	H2 MFC set to  0.000000
6/18/2010	9:26:09 AM	BCl3 MFC set to  0.000000
6/18/2010	9:26:09 AM	PHl3 MFC set to  0.000000
6/18/2010	9:26:09 AM	SiCl4 MFC set to  0.000000
6/18/2010	9:26:09 AM	Bypass solenoid MFC set to  0.000000
6/18/2010	9:26:09 AM	Tube furnace set to 0
6/18/2010	9:27:29 AM	Helium valve closed
6/18/2010	9:27:29 AM	H2 valve closed
6/18/2010	9:27:29 AM	BCl3 valve closed
6/18/2010	9:27:29 AM	PH3 valve closed
6/18/2010	9:27:29 AM	SiCl4 pre valve closed
6/18/2010	9:27:29 AM	SiCl4 post valve closed
6/18/2010	9:27:29 AM	Main Vac valve closed
6/18/2010	9:27:29 AM	Bypass valve closed
6/18/2010	9:27:29 AM	Bubbler valve closed
6/18/2010	9:27:29 AM	Helium MFC set to  0.000000
6/18/2010	9:27:29 AM	H2 MFC set to  0.000000
6/18/2010	9:27:29 AM	BCl3 MFC set to  0.000000
6/18/2010	9:27:29 AM	PHl3 MFC set to  0.000000
6/18/2010	9:27:29 AM	SiCl4 MFC set to  0.000000
6/18/2010	9:27:29 AM	Bypass solenoid MFC set to  0.000000
6/18/2010	9:27:29 AM	Tube furnace set to 0
6/18/2010	9:27:29 AM	Run finished at 9:27 AM
6/18/2010	9:27:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/18/2010	9:27:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/18/2010	9:27:40 AM	Recipe started at 9:27 AM
6/18/2010	9:27:40 AM	Helium valve closed
6/18/2010	9:27:40 AM	H2 valve closed
6/18/2010	9:27:40 AM	BCl3 valve closed
6/18/2010	9:27:40 AM	PH3 valve closed
6/18/2010	9:27:40 AM	SiCl4 pre valve closed
6/18/2010	9:27:40 AM	SiCl4 post valve closed
6/18/2010	9:27:40 AM	Main Vac valve closed
6/18/2010	9:27:40 AM	Bubbler valve closed
6/18/2010	9:27:40 AM	Bypass valve opened
6/18/2010	9:27:40 AM	Helium MFC set to  0.000000
6/18/2010	9:27:40 AM	H2 MFC set to  0.000000
6/18/2010	9:27:40 AM	BCl3 MFC set to  0.000000
6/18/2010	9:27:40 AM	PHl3 MFC set to  0.000000
6/18/2010	9:27:40 AM	SiCl4 MFC set to  0.000000
6/18/2010	9:27:40 AM	Bypass solenoid MFC set to  0.000000
6/18/2010	9:27:40 AM	Tube furnace set to 0
6/18/2010	9:28:14 AM	Helium valve closed
6/18/2010	9:28:14 AM	H2 valve closed
6/18/2010	9:28:14 AM	BCl3 valve closed
6/18/2010	9:28:14 AM	PH3 valve closed
6/18/2010	9:28:14 AM	SiCl4 pre valve closed
6/18/2010	9:28:14 AM	SiCl4 post valve closed
6/18/2010	9:28:14 AM	Bubbler valve closed
6/18/2010	9:28:14 AM	Main Vac valve opened
6/18/2010	9:28:14 AM	Bypass valve opened
6/18/2010	9:28:14 AM	Helium MFC set to  0.000000
6/18/2010	9:28:14 AM	H2 MFC set to  0.000000
6/18/2010	9:28:14 AM	BCl3 MFC set to  0.000000
6/18/2010	9:28:14 AM	PHl3 MFC set to  0.000000
6/18/2010	9:28:14 AM	SiCl4 MFC set to  0.000000
6/18/2010	9:28:14 AM	Bypass solenoid MFC set to  0.000000
6/18/2010	9:28:14 AM	Tube furnace set to 0
6/18/2010	9:28:14 AM	Run finished at 9:28 AM
6/18/2010	9:28:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/18/2010	9:28:44 AM	Helium MFC set to  100.000000
6/18/2010	9:28:56 AM	Helium valve opened
6/18/2010	9:41:03 AM	Helium valve closed
6/18/2010	9:41:51 AM	Helium valve opened
6/18/2010	9:53:07 AM	Helium valve closed
6/18/2010	9:54:30 AM	Main Vac valve closed
6/18/2010	9:54:30 AM	Bypass valve closed
6/18/2010	9:54:49 AM	Bypass valve opened
6/18/2010	9:54:50 AM	Main Vac valve opened
6/18/2010	9:54:56 AM	Helium valve opened
6/18/2010	9:59:42 AM	Helium valve closed
6/18/2010	10:00:50 AM	Helium MFC set to  0.000000
6/18/2010	10:01:42 AM	Recipe started at 10:01 AM
6/18/2010	10:01:42 AM	Helium valve closed
6/18/2010	10:01:42 AM	BCl3 valve closed
6/18/2010	10:01:42 AM	PH3 valve closed
6/18/2010	10:01:42 AM	SiCl4 pre valve closed
6/18/2010	10:01:42 AM	SiCl4 post valve closed
6/18/2010	10:01:42 AM	Main Vac valve closed
6/18/2010	10:01:42 AM	Bypass valve closed
6/18/2010	10:01:42 AM	Bubbler valve closed
6/18/2010	10:01:42 AM	H2 valve opened
6/18/2010	10:01:42 AM	Helium MFC set to  0.000000
6/18/2010	10:01:42 AM	H2 MFC set to  500.000000
6/18/2010	10:01:42 AM	BCl3 MFC set to  0.000000
6/18/2010	10:01:42 AM	PHl3 MFC set to  0.000000
6/18/2010	10:01:42 AM	SiCl4 MFC set to  0.000000
6/18/2010	10:01:42 AM	Bypass solenoid MFC set to  0.000000
6/18/2010	10:01:42 AM	Tube furnace set to 0
6/18/2010	10:03:05 AM	Helium valve closed
6/18/2010	10:03:05 AM	BCl3 valve closed
6/18/2010	10:03:05 AM	PH3 valve closed
6/18/2010	10:03:05 AM	SiCl4 pre valve closed
6/18/2010	10:03:05 AM	SiCl4 post valve closed
6/18/2010	10:03:05 AM	Main Vac valve closed
6/18/2010	10:03:05 AM	Bypass valve closed
6/18/2010	10:03:05 AM	H2 valve opened
6/18/2010	10:03:05 AM	Bubbler valve opened
6/18/2010	10:03:05 AM	Helium MFC set to  0.000000
6/18/2010	10:03:05 AM	H2 MFC set to  500.000000
6/18/2010	10:03:05 AM	BCl3 MFC set to  0.000000
6/18/2010	10:03:05 AM	PHl3 MFC set to  0.000000
6/18/2010	10:03:05 AM	SiCl4 MFC set to  0.000000
6/18/2010	10:03:05 AM	Bypass solenoid MFC set to  0.000000
6/18/2010	10:03:05 AM	Tube furnace set to 1000
6/18/2010	10:23:05 AM	Helium valve closed
6/18/2010	10:23:05 AM	PH3 valve closed
6/18/2010	10:23:05 AM	Main Vac valve closed
6/18/2010	10:23:05 AM	Bypass valve closed
6/18/2010	10:23:05 AM	H2 valve opened
6/18/2010	10:23:05 AM	BCl3 valve opened
6/18/2010	10:23:05 AM	SiCl4 pre valve opened
6/18/2010	10:23:05 AM	SiCl4 post valve opened
6/18/2010	10:23:05 AM	Bubbler valve opened
6/18/2010	10:23:05 AM	Helium MFC set to  0.000000
6/18/2010	10:23:05 AM	H2 MFC set to  500.000000
6/18/2010	10:23:05 AM	BCl3 MFC set to  35.000000
6/18/2010	10:23:05 AM	PHl3 MFC set to  0.000000
6/18/2010	10:23:05 AM	SiCl4 MFC set to  50.000000
6/18/2010	10:23:05 AM	Bypass solenoid MFC set to  0.000000
6/18/2010	10:23:05 AM	Tube furnace set to 1000
6/18/2010	10:43:05 AM	H2 valve closed
6/18/2010	10:43:05 AM	BCl3 valve closed
6/18/2010	10:43:05 AM	PH3 valve closed
6/18/2010	10:43:05 AM	SiCl4 pre valve closed
6/18/2010	10:43:05 AM	SiCl4 post valve closed
6/18/2010	10:43:05 AM	Main Vac valve closed
6/18/2010	10:43:05 AM	Bypass valve closed
6/18/2010	10:43:05 AM	Helium valve opened
6/18/2010	10:43:05 AM	Bubbler valve opened
6/18/2010	10:43:05 AM	Helium MFC set to  500.000000
6/18/2010	10:43:05 AM	H2 MFC set to  0.000000
6/18/2010	10:43:05 AM	BCl3 MFC set to  0.000000
6/18/2010	10:43:05 AM	PHl3 MFC set to  0.000000
6/18/2010	10:43:05 AM	SiCl4 MFC set to  0.000000
6/18/2010	10:43:05 AM	Bypass solenoid MFC set to  0.000000
6/18/2010	10:43:05 AM	Tube furnace set to 0
6/18/2010	11:03:05 AM	Helium valve closed
6/18/2010	11:03:05 AM	H2 valve closed
6/18/2010	11:03:05 AM	BCl3 valve closed
6/18/2010	11:03:05 AM	PH3 valve closed
6/18/2010	11:03:05 AM	SiCl4 pre valve closed
6/18/2010	11:03:05 AM	SiCl4 post valve closed
6/18/2010	11:03:05 AM	Main Vac valve closed
6/18/2010	11:03:05 AM	Bypass valve closed
6/18/2010	11:03:05 AM	Bubbler valve closed
6/18/2010	11:03:05 AM	Helium MFC set to  0.000000
6/18/2010	11:03:05 AM	H2 MFC set to  0.000000
6/18/2010	11:03:05 AM	BCl3 MFC set to  0.000000
6/18/2010	11:03:05 AM	PHl3 MFC set to  0.000000
6/18/2010	11:03:05 AM	SiCl4 MFC set to  0.000000
6/18/2010	11:03:05 AM	Bypass solenoid MFC set to  0.000000
6/18/2010	11:03:05 AM	Tube furnace set to 0
6/18/2010	11:03:06 AM	Run finished at 11:03 AM
6/18/2010	12:07:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/18/2010	12:07:34 PM	Recipe started at 12:07 PM
6/18/2010	12:07:34 PM	H2 valve closed
6/18/2010	12:07:34 PM	BCl3 valve closed
6/18/2010	12:07:34 PM	PH3 valve closed
6/18/2010	12:07:34 PM	SiCl4 pre valve closed
6/18/2010	12:07:34 PM	SiCl4 post valve closed
6/18/2010	12:07:34 PM	Main Vac valve closed
6/18/2010	12:07:34 PM	Bypass valve closed
6/18/2010	12:07:34 PM	Bubbler valve closed
6/18/2010	12:07:34 PM	Helium valve opened
6/18/2010	12:07:34 PM	Helium MFC set to  500.000000
6/18/2010	12:07:34 PM	H2 MFC set to  0.000000
6/18/2010	12:07:34 PM	BCl3 MFC set to  0.000000
6/18/2010	12:07:34 PM	PHl3 MFC set to  0.000000
6/18/2010	12:07:34 PM	SiCl4 MFC set to  0.000000
6/18/2010	12:07:34 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	12:07:34 PM	Tube furnace set to 0
6/18/2010	12:07:35 PM	Helium valve closed
6/18/2010	12:07:35 PM	H2 valve closed
6/18/2010	12:07:35 PM	BCl3 valve closed
6/18/2010	12:07:35 PM	PH3 valve closed
6/18/2010	12:07:35 PM	SiCl4 pre valve closed
6/18/2010	12:07:35 PM	SiCl4 post valve closed
6/18/2010	12:07:35 PM	Main Vac valve closed
6/18/2010	12:07:35 PM	Bypass valve closed
6/18/2010	12:07:35 PM	Bubbler valve closed
6/18/2010	12:07:35 PM	Helium MFC set to  0.000000
6/18/2010	12:07:35 PM	H2 MFC set to  0.000000
6/18/2010	12:07:35 PM	BCl3 MFC set to  0.000000
6/18/2010	12:07:35 PM	PHl3 MFC set to  0.000000
6/18/2010	12:07:35 PM	SiCl4 MFC set to  0.000000
6/18/2010	12:07:35 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	12:07:35 PM	Tube furnace set to 0
6/18/2010	12:07:35 PM	Run finished at 12:07 PM
6/18/2010	12:07:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/18/2010	12:12:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/18/2010	12:12:10 PM	Recipe started at 12:12 PM
6/18/2010	12:12:10 PM	Helium valve closed
6/18/2010	12:12:10 PM	H2 valve closed
6/18/2010	12:12:10 PM	BCl3 valve closed
6/18/2010	12:12:10 PM	PH3 valve closed
6/18/2010	12:12:10 PM	SiCl4 pre valve closed
6/18/2010	12:12:10 PM	SiCl4 post valve closed
6/18/2010	12:12:10 PM	Main Vac valve closed
6/18/2010	12:12:10 PM	Bubbler valve closed
6/18/2010	12:12:10 PM	Bypass valve opened
6/18/2010	12:12:10 PM	Helium MFC set to  0.000000
6/18/2010	12:12:10 PM	H2 MFC set to  0.000000
6/18/2010	12:12:10 PM	BCl3 MFC set to  0.000000
6/18/2010	12:12:10 PM	PHl3 MFC set to  0.000000
6/18/2010	12:12:10 PM	SiCl4 MFC set to  0.000000
6/18/2010	12:12:10 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	12:12:10 PM	Tube furnace set to 0
6/18/2010	12:12:58 PM	Helium valve closed
6/18/2010	12:12:58 PM	H2 valve closed
6/18/2010	12:12:58 PM	BCl3 valve closed
6/18/2010	12:12:58 PM	PH3 valve closed
6/18/2010	12:12:58 PM	SiCl4 pre valve closed
6/18/2010	12:12:58 PM	SiCl4 post valve closed
6/18/2010	12:12:58 PM	Bubbler valve closed
6/18/2010	12:12:58 PM	Main Vac valve opened
6/18/2010	12:12:58 PM	Bypass valve opened
6/18/2010	12:12:58 PM	Helium MFC set to  0.000000
6/18/2010	12:12:58 PM	H2 MFC set to  0.000000
6/18/2010	12:12:58 PM	BCl3 MFC set to  0.000000
6/18/2010	12:12:58 PM	PHl3 MFC set to  0.000000
6/18/2010	12:12:58 PM	SiCl4 MFC set to  0.000000
6/18/2010	12:12:58 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	12:12:58 PM	Tube furnace set to 0
6/18/2010	12:12:59 PM	Run finished at 12:12 PM
6/18/2010	12:12:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/18/2010	12:13:41 PM	Helium MFC set to  100.000000
6/18/2010	12:13:42 PM	Helium valve opened
6/18/2010	12:21:10 PM	Helium valve closed
6/18/2010	12:21:15 PM	Helium MFC set to  0.000000
6/18/2010	1:44:15 PM	Recipe started at 1:44 PM
6/18/2010	1:44:15 PM	Helium valve closed
6/18/2010	1:44:15 PM	BCl3 valve closed
6/18/2010	1:44:15 PM	PH3 valve closed
6/18/2010	1:44:15 PM	SiCl4 pre valve closed
6/18/2010	1:44:15 PM	SiCl4 post valve closed
6/18/2010	1:44:15 PM	Main Vac valve closed
6/18/2010	1:44:15 PM	Bypass valve closed
6/18/2010	1:44:15 PM	Bubbler valve closed
6/18/2010	1:44:15 PM	H2 valve opened
6/18/2010	1:44:15 PM	Helium MFC set to  0.000000
6/18/2010	1:44:15 PM	H2 MFC set to  500.000000
6/18/2010	1:44:15 PM	BCl3 MFC set to  0.000000
6/18/2010	1:44:15 PM	PHl3 MFC set to  0.000000
6/18/2010	1:44:15 PM	SiCl4 MFC set to  0.000000
6/18/2010	1:44:15 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	1:44:15 PM	Tube furnace set to 0
6/18/2010	1:45:37 PM	Helium valve closed
6/18/2010	1:45:37 PM	BCl3 valve closed
6/18/2010	1:45:37 PM	PH3 valve closed
6/18/2010	1:45:37 PM	SiCl4 pre valve closed
6/18/2010	1:45:37 PM	SiCl4 post valve closed
6/18/2010	1:45:37 PM	Main Vac valve closed
6/18/2010	1:45:37 PM	Bypass valve closed
6/18/2010	1:45:37 PM	H2 valve opened
6/18/2010	1:45:37 PM	Bubbler valve opened
6/18/2010	1:45:37 PM	Helium MFC set to  0.000000
6/18/2010	1:45:37 PM	H2 MFC set to  500.000000
6/18/2010	1:45:37 PM	BCl3 MFC set to  0.000000
6/18/2010	1:45:37 PM	PHl3 MFC set to  0.000000
6/18/2010	1:45:37 PM	SiCl4 MFC set to  0.000000
6/18/2010	1:45:37 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	1:45:37 PM	Tube furnace set to 1000
6/18/2010	2:05:37 PM	Helium valve closed
6/18/2010	2:05:37 PM	PH3 valve closed
6/18/2010	2:05:37 PM	Main Vac valve closed
6/18/2010	2:05:37 PM	Bypass valve closed
6/18/2010	2:05:37 PM	H2 valve opened
6/18/2010	2:05:37 PM	BCl3 valve opened
6/18/2010	2:05:37 PM	SiCl4 pre valve opened
6/18/2010	2:05:37 PM	SiCl4 post valve opened
6/18/2010	2:05:37 PM	Bubbler valve opened
6/18/2010	2:05:37 PM	Helium MFC set to  0.000000
6/18/2010	2:05:37 PM	H2 MFC set to  500.000000
6/18/2010	2:05:37 PM	BCl3 MFC set to  35.000000
6/18/2010	2:05:37 PM	PHl3 MFC set to  0.000000
6/18/2010	2:05:37 PM	SiCl4 MFC set to  50.000000
6/18/2010	2:05:37 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	2:05:37 PM	Tube furnace set to 1000
6/18/2010	2:25:37 PM	H2 valve closed
6/18/2010	2:25:37 PM	BCl3 valve closed
6/18/2010	2:25:37 PM	PH3 valve closed
6/18/2010	2:25:37 PM	SiCl4 pre valve closed
6/18/2010	2:25:37 PM	SiCl4 post valve closed
6/18/2010	2:25:37 PM	Main Vac valve closed
6/18/2010	2:25:37 PM	Bypass valve closed
6/18/2010	2:25:37 PM	Helium valve opened
6/18/2010	2:25:37 PM	Bubbler valve opened
6/18/2010	2:25:37 PM	Helium MFC set to  500.000000
6/18/2010	2:25:37 PM	H2 MFC set to  0.000000
6/18/2010	2:25:37 PM	BCl3 MFC set to  0.000000
6/18/2010	2:25:37 PM	PHl3 MFC set to  0.000000
6/18/2010	2:25:37 PM	SiCl4 MFC set to  0.000000
6/18/2010	2:25:37 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	2:25:37 PM	Tube furnace set to 0
6/18/2010	2:45:37 PM	Helium valve closed
6/18/2010	2:45:37 PM	H2 valve closed
6/18/2010	2:45:37 PM	BCl3 valve closed
6/18/2010	2:45:37 PM	PH3 valve closed
6/18/2010	2:45:37 PM	SiCl4 pre valve closed
6/18/2010	2:45:37 PM	SiCl4 post valve closed
6/18/2010	2:45:37 PM	Main Vac valve closed
6/18/2010	2:45:37 PM	Bypass valve closed
6/18/2010	2:45:37 PM	Bubbler valve closed
6/18/2010	2:45:37 PM	Helium MFC set to  0.000000
6/18/2010	2:45:37 PM	H2 MFC set to  0.000000
6/18/2010	2:45:37 PM	BCl3 MFC set to  0.000000
6/18/2010	2:45:37 PM	PHl3 MFC set to  0.000000
6/18/2010	2:45:37 PM	SiCl4 MFC set to  0.000000
6/18/2010	2:45:37 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	2:45:38 PM	Tube furnace set to 0
6/18/2010	2:45:38 PM	Run finished at 2:45 PM
6/18/2010	2:55:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/18/2010	2:55:27 PM	Recipe started at 2:55 PM
6/18/2010	2:55:27 PM	Helium valve closed
6/18/2010	2:55:27 PM	H2 valve closed
6/18/2010	2:55:27 PM	BCl3 valve closed
6/18/2010	2:55:27 PM	PH3 valve closed
6/18/2010	2:55:27 PM	SiCl4 pre valve closed
6/18/2010	2:55:27 PM	SiCl4 post valve closed
6/18/2010	2:55:27 PM	Main Vac valve closed
6/18/2010	2:55:27 PM	Bubbler valve closed
6/18/2010	2:55:27 PM	Bypass valve opened
6/18/2010	2:55:27 PM	Helium MFC set to  0.000000
6/18/2010	2:55:27 PM	H2 MFC set to  0.000000
6/18/2010	2:55:27 PM	BCl3 MFC set to  0.000000
6/18/2010	2:55:27 PM	PHl3 MFC set to  0.000000
6/18/2010	2:55:27 PM	SiCl4 MFC set to  0.000000
6/18/2010	2:55:27 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	2:55:27 PM	Tube furnace set to 0
6/18/2010	2:56:16 PM	Helium valve closed
6/18/2010	2:56:16 PM	H2 valve closed
6/18/2010	2:56:16 PM	BCl3 valve closed
6/18/2010	2:56:16 PM	PH3 valve closed
6/18/2010	2:56:16 PM	SiCl4 pre valve closed
6/18/2010	2:56:16 PM	SiCl4 post valve closed
6/18/2010	2:56:16 PM	Bubbler valve closed
6/18/2010	2:56:16 PM	Main Vac valve opened
6/18/2010	2:56:16 PM	Bypass valve opened
6/18/2010	2:56:16 PM	Helium MFC set to  0.000000
6/18/2010	2:56:16 PM	H2 MFC set to  0.000000
6/18/2010	2:56:16 PM	BCl3 MFC set to  0.000000
6/18/2010	2:56:16 PM	PHl3 MFC set to  0.000000
6/18/2010	2:56:16 PM	SiCl4 MFC set to  0.000000
6/18/2010	2:56:16 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	2:56:16 PM	Tube furnace set to 0
6/18/2010	2:56:16 PM	Run finished at 2:56 PM
6/18/2010	2:56:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/18/2010	2:56:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/18/2010	2:56:54 PM	Recipe started at 2:56 PM
6/18/2010	2:56:54 PM	H2 valve closed
6/18/2010	2:56:54 PM	BCl3 valve closed
6/18/2010	2:56:54 PM	PH3 valve closed
6/18/2010	2:56:54 PM	SiCl4 pre valve closed
6/18/2010	2:56:54 PM	SiCl4 post valve closed
6/18/2010	2:56:54 PM	Main Vac valve closed
6/18/2010	2:56:54 PM	Bypass valve closed
6/18/2010	2:56:54 PM	Bubbler valve closed
6/18/2010	2:56:54 PM	Helium valve opened
6/18/2010	2:56:54 PM	Helium MFC set to  500.000000
6/18/2010	2:56:54 PM	H2 MFC set to  0.000000
6/18/2010	2:56:54 PM	BCl3 MFC set to  0.000000
6/18/2010	2:56:54 PM	PHl3 MFC set to  0.000000
6/18/2010	2:56:54 PM	SiCl4 MFC set to  0.000000
6/18/2010	2:56:54 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	2:56:54 PM	Tube furnace set to 0
6/18/2010	2:58:11 PM	Helium valve closed
6/18/2010	2:58:11 PM	H2 valve closed
6/18/2010	2:58:11 PM	BCl3 valve closed
6/18/2010	2:58:11 PM	PH3 valve closed
6/18/2010	2:58:11 PM	SiCl4 pre valve closed
6/18/2010	2:58:11 PM	SiCl4 post valve closed
6/18/2010	2:58:11 PM	Main Vac valve closed
6/18/2010	2:58:11 PM	Bypass valve closed
6/18/2010	2:58:11 PM	Bubbler valve closed
6/18/2010	2:58:11 PM	Helium MFC set to  0.000000
6/18/2010	2:58:11 PM	H2 MFC set to  0.000000
6/18/2010	2:58:11 PM	BCl3 MFC set to  0.000000
6/18/2010	2:58:11 PM	PHl3 MFC set to  0.000000
6/18/2010	2:58:11 PM	SiCl4 MFC set to  0.000000
6/18/2010	2:58:11 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	2:58:11 PM	Tube furnace set to 0
6/18/2010	2:58:12 PM	Run finished at 2:58 PM
6/18/2010	2:58:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/18/2010	2:58:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/18/2010	2:58:36 PM	Recipe started at 2:58 PM
6/18/2010	2:58:37 PM	H2 valve closed
6/18/2010	2:58:37 PM	BCl3 valve closed
6/18/2010	2:58:37 PM	PH3 valve closed
6/18/2010	2:58:37 PM	SiCl4 pre valve closed
6/18/2010	2:58:37 PM	SiCl4 post valve closed
6/18/2010	2:58:37 PM	Main Vac valve closed
6/18/2010	2:58:37 PM	Bypass valve closed
6/18/2010	2:58:37 PM	Bubbler valve closed
6/18/2010	2:58:37 PM	Helium valve opened
6/18/2010	2:58:37 PM	Helium MFC set to  500.000000
6/18/2010	2:58:37 PM	H2 MFC set to  0.000000
6/18/2010	2:58:37 PM	BCl3 MFC set to  0.000000
6/18/2010	2:58:37 PM	PHl3 MFC set to  0.000000
6/18/2010	2:58:37 PM	SiCl4 MFC set to  0.000000
6/18/2010	2:58:37 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	2:58:37 PM	Tube furnace set to 0
6/18/2010	2:58:39 PM	Helium valve closed
6/18/2010	2:58:39 PM	H2 valve closed
6/18/2010	2:58:39 PM	BCl3 valve closed
6/18/2010	2:58:39 PM	PH3 valve closed
6/18/2010	2:58:39 PM	SiCl4 pre valve closed
6/18/2010	2:58:39 PM	SiCl4 post valve closed
6/18/2010	2:58:39 PM	Main Vac valve closed
6/18/2010	2:58:39 PM	Bypass valve closed
6/18/2010	2:58:39 PM	Bubbler valve closed
6/18/2010	2:58:39 PM	Helium MFC set to  0.000000
6/18/2010	2:58:39 PM	H2 MFC set to  0.000000
6/18/2010	2:58:39 PM	BCl3 MFC set to  0.000000
6/18/2010	2:58:39 PM	PHl3 MFC set to  0.000000
6/18/2010	2:58:39 PM	SiCl4 MFC set to  0.000000
6/18/2010	2:58:39 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	2:58:39 PM	Tube furnace set to 0
6/18/2010	2:58:54 PM	Helium valve closed
6/18/2010	2:58:54 PM	H2 valve closed
6/18/2010	2:58:54 PM	BCl3 valve closed
6/18/2010	2:58:54 PM	PH3 valve closed
6/18/2010	2:58:54 PM	SiCl4 pre valve closed
6/18/2010	2:58:54 PM	SiCl4 post valve closed
6/18/2010	2:58:54 PM	Main Vac valve closed
6/18/2010	2:58:54 PM	Bubbler valve closed
6/18/2010	2:58:54 PM	Bypass valve opened
6/18/2010	2:58:54 PM	Helium MFC set to  0.000000
6/18/2010	2:58:54 PM	H2 MFC set to  0.000000
6/18/2010	2:58:54 PM	BCl3 MFC set to  0.000000
6/18/2010	2:58:54 PM	PHl3 MFC set to  0.000000
6/18/2010	2:58:54 PM	SiCl4 MFC set to  0.000000
6/18/2010	2:58:54 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	2:58:54 PM	Tube furnace set to 0
6/18/2010	2:59:27 PM	Helium valve closed
6/18/2010	2:59:27 PM	H2 valve closed
6/18/2010	2:59:27 PM	BCl3 valve closed
6/18/2010	2:59:27 PM	PH3 valve closed
6/18/2010	2:59:27 PM	SiCl4 pre valve closed
6/18/2010	2:59:27 PM	SiCl4 post valve closed
6/18/2010	2:59:27 PM	Bubbler valve closed
6/18/2010	2:59:27 PM	Main Vac valve opened
6/18/2010	2:59:27 PM	Bypass valve opened
6/18/2010	2:59:27 PM	Helium MFC set to  0.000000
6/18/2010	2:59:27 PM	H2 MFC set to  0.000000
6/18/2010	2:59:27 PM	BCl3 MFC set to  0.000000
6/18/2010	2:59:27 PM	PHl3 MFC set to  0.000000
6/18/2010	2:59:27 PM	SiCl4 MFC set to  0.000000
6/18/2010	2:59:27 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	2:59:27 PM	Tube furnace set to 0
6/18/2010	3:04:27 PM	H2 valve closed
6/18/2010	3:04:27 PM	BCl3 valve closed
6/18/2010	3:04:27 PM	PH3 valve closed
6/18/2010	3:04:27 PM	SiCl4 pre valve closed
6/18/2010	3:04:27 PM	SiCl4 post valve closed
6/18/2010	3:04:27 PM	Main Vac valve closed
6/18/2010	3:04:27 PM	Bypass valve closed
6/18/2010	3:04:27 PM	Bubbler valve closed
6/18/2010	3:04:27 PM	Helium valve opened
6/18/2010	3:04:27 PM	Helium MFC set to  500.000000
6/18/2010	3:04:27 PM	H2 MFC set to  0.000000
6/18/2010	3:04:27 PM	BCl3 MFC set to  0.000000
6/18/2010	3:04:27 PM	PHl3 MFC set to  0.000000
6/18/2010	3:04:27 PM	SiCl4 MFC set to  0.000000
6/18/2010	3:04:27 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	3:04:27 PM	Tube furnace set to 0
6/18/2010	3:05:45 PM	Helium valve closed
6/18/2010	3:05:45 PM	H2 valve closed
6/18/2010	3:05:45 PM	BCl3 valve closed
6/18/2010	3:05:45 PM	PH3 valve closed
6/18/2010	3:05:45 PM	SiCl4 pre valve closed
6/18/2010	3:05:45 PM	SiCl4 post valve closed
6/18/2010	3:05:45 PM	Main Vac valve closed
6/18/2010	3:05:45 PM	Bypass valve closed
6/18/2010	3:05:45 PM	Bubbler valve closed
6/18/2010	3:05:45 PM	Helium MFC set to  0.000000
6/18/2010	3:05:45 PM	H2 MFC set to  0.000000
6/18/2010	3:05:45 PM	BCl3 MFC set to  0.000000
6/18/2010	3:05:45 PM	PHl3 MFC set to  0.000000
6/18/2010	3:05:45 PM	SiCl4 MFC set to  0.000000
6/18/2010	3:05:45 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	3:05:45 PM	Tube furnace set to 0
6/18/2010	3:06:00 PM	Helium valve closed
6/18/2010	3:06:00 PM	H2 valve closed
6/18/2010	3:06:00 PM	BCl3 valve closed
6/18/2010	3:06:00 PM	PH3 valve closed
6/18/2010	3:06:00 PM	SiCl4 pre valve closed
6/18/2010	3:06:00 PM	SiCl4 post valve closed
6/18/2010	3:06:00 PM	Main Vac valve closed
6/18/2010	3:06:00 PM	Bubbler valve closed
6/18/2010	3:06:00 PM	Bypass valve opened
6/18/2010	3:06:00 PM	Helium MFC set to  0.000000
6/18/2010	3:06:00 PM	H2 MFC set to  0.000000
6/18/2010	3:06:00 PM	BCl3 MFC set to  0.000000
6/18/2010	3:06:00 PM	PHl3 MFC set to  0.000000
6/18/2010	3:06:00 PM	SiCl4 MFC set to  0.000000
6/18/2010	3:06:00 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	3:06:01 PM	Tube furnace set to 0
6/18/2010	3:06:33 PM	Helium valve closed
6/18/2010	3:06:33 PM	H2 valve closed
6/18/2010	3:06:33 PM	BCl3 valve closed
6/18/2010	3:06:33 PM	PH3 valve closed
6/18/2010	3:06:33 PM	SiCl4 pre valve closed
6/18/2010	3:06:33 PM	SiCl4 post valve closed
6/18/2010	3:06:33 PM	Bubbler valve closed
6/18/2010	3:06:33 PM	Main Vac valve opened
6/18/2010	3:06:33 PM	Bypass valve opened
6/18/2010	3:06:33 PM	Helium MFC set to  0.000000
6/18/2010	3:06:33 PM	H2 MFC set to  0.000000
6/18/2010	3:06:33 PM	BCl3 MFC set to  0.000000
6/18/2010	3:06:33 PM	PHl3 MFC set to  0.000000
6/18/2010	3:06:33 PM	SiCl4 MFC set to  0.000000
6/18/2010	3:06:33 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	3:06:33 PM	Tube furnace set to 0
6/18/2010	3:11:33 PM	H2 valve closed
6/18/2010	3:11:33 PM	BCl3 valve closed
6/18/2010	3:11:33 PM	PH3 valve closed
6/18/2010	3:11:33 PM	SiCl4 pre valve closed
6/18/2010	3:11:33 PM	SiCl4 post valve closed
6/18/2010	3:11:33 PM	Main Vac valve closed
6/18/2010	3:11:33 PM	Bypass valve closed
6/18/2010	3:11:33 PM	Bubbler valve closed
6/18/2010	3:11:33 PM	Helium valve opened
6/18/2010	3:11:33 PM	Helium MFC set to  500.000000
6/18/2010	3:11:33 PM	H2 MFC set to  0.000000
6/18/2010	3:11:33 PM	BCl3 MFC set to  0.000000
6/18/2010	3:11:33 PM	PHl3 MFC set to  0.000000
6/18/2010	3:11:33 PM	SiCl4 MFC set to  0.000000
6/18/2010	3:11:33 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	3:11:33 PM	Tube furnace set to 0
6/18/2010	3:12:51 PM	Helium valve closed
6/18/2010	3:12:51 PM	H2 valve closed
6/18/2010	3:12:51 PM	BCl3 valve closed
6/18/2010	3:12:51 PM	PH3 valve closed
6/18/2010	3:12:51 PM	SiCl4 pre valve closed
6/18/2010	3:12:51 PM	SiCl4 post valve closed
6/18/2010	3:12:51 PM	Main Vac valve closed
6/18/2010	3:12:51 PM	Bypass valve closed
6/18/2010	3:12:51 PM	Bubbler valve closed
6/18/2010	3:12:51 PM	Helium MFC set to  0.000000
6/18/2010	3:12:51 PM	H2 MFC set to  0.000000
6/18/2010	3:12:51 PM	BCl3 MFC set to  0.000000
6/18/2010	3:12:51 PM	PHl3 MFC set to  0.000000
6/18/2010	3:12:51 PM	SiCl4 MFC set to  0.000000
6/18/2010	3:12:51 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	3:12:51 PM	Tube furnace set to 0
6/18/2010	3:13:06 PM	Helium valve closed
6/18/2010	3:13:06 PM	H2 valve closed
6/18/2010	3:13:06 PM	BCl3 valve closed
6/18/2010	3:13:06 PM	PH3 valve closed
6/18/2010	3:13:06 PM	SiCl4 pre valve closed
6/18/2010	3:13:06 PM	SiCl4 post valve closed
6/18/2010	3:13:06 PM	Main Vac valve closed
6/18/2010	3:13:06 PM	Bubbler valve closed
6/18/2010	3:13:06 PM	Bypass valve opened
6/18/2010	3:13:06 PM	Helium MFC set to  0.000000
6/18/2010	3:13:06 PM	H2 MFC set to  0.000000
6/18/2010	3:13:06 PM	BCl3 MFC set to  0.000000
6/18/2010	3:13:06 PM	PHl3 MFC set to  0.000000
6/18/2010	3:13:06 PM	SiCl4 MFC set to  0.000000
6/18/2010	3:13:06 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	3:13:07 PM	Tube furnace set to 0
6/18/2010	3:13:39 PM	Helium valve closed
6/18/2010	3:13:39 PM	H2 valve closed
6/18/2010	3:13:39 PM	BCl3 valve closed
6/18/2010	3:13:39 PM	PH3 valve closed
6/18/2010	3:13:39 PM	SiCl4 pre valve closed
6/18/2010	3:13:39 PM	SiCl4 post valve closed
6/18/2010	3:13:39 PM	Bubbler valve closed
6/18/2010	3:13:39 PM	Main Vac valve opened
6/18/2010	3:13:39 PM	Bypass valve opened
6/18/2010	3:13:39 PM	Helium MFC set to  0.000000
6/18/2010	3:13:39 PM	H2 MFC set to  0.000000
6/18/2010	3:13:39 PM	BCl3 MFC set to  0.000000
6/18/2010	3:13:39 PM	PHl3 MFC set to  0.000000
6/18/2010	3:13:39 PM	SiCl4 MFC set to  0.000000
6/18/2010	3:13:39 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	3:13:39 PM	Tube furnace set to 0
6/18/2010	3:18:39 PM	Helium valve closed
6/18/2010	3:18:39 PM	H2 valve closed
6/18/2010	3:18:39 PM	BCl3 valve closed
6/18/2010	3:18:39 PM	PH3 valve closed
6/18/2010	3:18:39 PM	SiCl4 pre valve closed
6/18/2010	3:18:39 PM	SiCl4 post valve closed
6/18/2010	3:18:39 PM	Bubbler valve closed
6/18/2010	3:18:39 PM	Main Vac valve opened
6/18/2010	3:18:39 PM	Bypass valve opened
6/18/2010	3:18:39 PM	Helium MFC set to  0.000000
6/18/2010	3:18:39 PM	H2 MFC set to  0.000000
6/18/2010	3:18:39 PM	BCl3 MFC set to  0.000000
6/18/2010	3:18:39 PM	PHl3 MFC set to  0.000000
6/18/2010	3:18:39 PM	SiCl4 MFC set to  0.000000
6/18/2010	3:18:39 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	3:18:39 PM	Tube furnace set to 0
6/18/2010	3:18:40 PM	Run finished at 3:18 PM
6/18/2010	3:18:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/18/2010	3:22:34 PM	Helium MFC set to  100.000000
6/18/2010	3:22:36 PM	Helium valve opened
6/18/2010	3:23:27 PM	Helium valve closed
6/18/2010	3:24:07 PM	Helium valve opened
6/18/2010	3:35:50 PM	Helium valve closed
6/18/2010	3:36:38 PM	Main Vac valve closed
6/18/2010	3:36:39 PM	Bypass valve closed
6/18/2010	3:36:54 PM	Main Vac valve opened
6/18/2010	3:36:55 PM	Bypass valve opened
6/18/2010	3:37:01 PM	Helium valve opened
6/18/2010	3:37:50 PM	Helium valve closed
6/18/2010	3:38:01 PM	Helium MFC set to  0.000000
6/18/2010	3:38:52 PM	Recipe started at 3:38 PM
6/18/2010	3:38:52 PM	Helium valve closed
6/18/2010	3:38:52 PM	BCl3 valve closed
6/18/2010	3:38:52 PM	PH3 valve closed
6/18/2010	3:38:52 PM	SiCl4 pre valve closed
6/18/2010	3:38:52 PM	SiCl4 post valve closed
6/18/2010	3:38:52 PM	Main Vac valve closed
6/18/2010	3:38:52 PM	Bypass valve closed
6/18/2010	3:38:52 PM	Bubbler valve closed
6/18/2010	3:38:52 PM	H2 valve opened
6/18/2010	3:38:52 PM	Helium MFC set to  0.000000
6/18/2010	3:38:52 PM	H2 MFC set to  500.000000
6/18/2010	3:38:52 PM	BCl3 MFC set to  0.000000
6/18/2010	3:38:52 PM	PHl3 MFC set to  0.000000
6/18/2010	3:38:52 PM	SiCl4 MFC set to  0.000000
6/18/2010	3:38:52 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	3:38:52 PM	Tube furnace set to 0
6/18/2010	3:40:11 PM	Helium valve closed
6/18/2010	3:40:11 PM	BCl3 valve closed
6/18/2010	3:40:11 PM	PH3 valve closed
6/18/2010	3:40:11 PM	SiCl4 pre valve closed
6/18/2010	3:40:11 PM	SiCl4 post valve closed
6/18/2010	3:40:11 PM	Main Vac valve closed
6/18/2010	3:40:11 PM	Bypass valve closed
6/18/2010	3:40:11 PM	H2 valve opened
6/18/2010	3:40:11 PM	Bubbler valve opened
6/18/2010	3:40:11 PM	Helium MFC set to  0.000000
6/18/2010	3:40:11 PM	H2 MFC set to  500.000000
6/18/2010	3:40:11 PM	BCl3 MFC set to  0.000000
6/18/2010	3:40:11 PM	PHl3 MFC set to  0.000000
6/18/2010	3:40:11 PM	SiCl4 MFC set to  0.000000
6/18/2010	3:40:11 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	3:40:11 PM	Tube furnace set to 1000
6/18/2010	4:00:11 PM	Helium valve closed
6/18/2010	4:00:11 PM	PH3 valve closed
6/18/2010	4:00:11 PM	Main Vac valve closed
6/18/2010	4:00:11 PM	Bypass valve closed
6/18/2010	4:00:11 PM	H2 valve opened
6/18/2010	4:00:11 PM	BCl3 valve opened
6/18/2010	4:00:11 PM	SiCl4 pre valve opened
6/18/2010	4:00:11 PM	SiCl4 post valve opened
6/18/2010	4:00:11 PM	Bubbler valve opened
6/18/2010	4:00:11 PM	Helium MFC set to  0.000000
6/18/2010	4:00:11 PM	H2 MFC set to  500.000000
6/18/2010	4:00:11 PM	BCl3 MFC set to  35.000000
6/18/2010	4:00:11 PM	PHl3 MFC set to  0.000000
6/18/2010	4:00:11 PM	SiCl4 MFC set to  50.000000
6/18/2010	4:00:11 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	4:00:12 PM	Tube furnace set to 1000
6/18/2010	4:20:11 PM	H2 valve closed
6/18/2010	4:20:11 PM	BCl3 valve closed
6/18/2010	4:20:11 PM	PH3 valve closed
6/18/2010	4:20:11 PM	SiCl4 pre valve closed
6/18/2010	4:20:11 PM	SiCl4 post valve closed
6/18/2010	4:20:11 PM	Main Vac valve closed
6/18/2010	4:20:11 PM	Bypass valve closed
6/18/2010	4:20:11 PM	Helium valve opened
6/18/2010	4:20:11 PM	Bubbler valve opened
6/18/2010	4:20:12 PM	Helium MFC set to  500.000000
6/18/2010	4:20:12 PM	H2 MFC set to  0.000000
6/18/2010	4:20:12 PM	BCl3 MFC set to  0.000000
6/18/2010	4:20:12 PM	PHl3 MFC set to  0.000000
6/18/2010	4:20:12 PM	SiCl4 MFC set to  0.000000
6/18/2010	4:20:12 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	4:20:12 PM	Tube furnace set to 0
6/18/2010	4:40:12 PM	Helium valve closed
6/18/2010	4:40:12 PM	H2 valve closed
6/18/2010	4:40:12 PM	BCl3 valve closed
6/18/2010	4:40:12 PM	PH3 valve closed
6/18/2010	4:40:12 PM	SiCl4 pre valve closed
6/18/2010	4:40:12 PM	SiCl4 post valve closed
6/18/2010	4:40:12 PM	Main Vac valve closed
6/18/2010	4:40:12 PM	Bypass valve closed
6/18/2010	4:40:12 PM	Bubbler valve closed
6/18/2010	4:40:12 PM	Helium MFC set to  0.000000
6/18/2010	4:40:12 PM	H2 MFC set to  0.000000
6/18/2010	4:40:12 PM	BCl3 MFC set to  0.000000
6/18/2010	4:40:12 PM	PHl3 MFC set to  0.000000
6/18/2010	4:40:12 PM	SiCl4 MFC set to  0.000000
6/18/2010	4:40:12 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	4:40:12 PM	Tube furnace set to 0
6/18/2010	4:40:12 PM	Run finished at 4:40 PM
6/18/2010	4:48:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/18/2010	4:48:37 PM	Recipe started at 4:48 PM
6/18/2010	4:48:37 PM	H2 valve closed
6/18/2010	4:48:37 PM	BCl3 valve closed
6/18/2010	4:48:37 PM	PH3 valve closed
6/18/2010	4:48:37 PM	SiCl4 pre valve closed
6/18/2010	4:48:37 PM	SiCl4 post valve closed
6/18/2010	4:48:37 PM	Main Vac valve closed
6/18/2010	4:48:37 PM	Bypass valve closed
6/18/2010	4:48:37 PM	Bubbler valve closed
6/18/2010	4:48:37 PM	Helium valve opened
6/18/2010	4:48:37 PM	Helium MFC set to  500.000000
6/18/2010	4:48:37 PM	H2 MFC set to  0.000000
6/18/2010	4:48:37 PM	BCl3 MFC set to  0.000000
6/18/2010	4:48:37 PM	PHl3 MFC set to  0.000000
6/18/2010	4:48:37 PM	SiCl4 MFC set to  0.000000
6/18/2010	4:48:37 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	4:48:37 PM	Tube furnace set to 0
6/18/2010	4:48:39 PM	Helium valve closed
6/18/2010	4:48:39 PM	H2 valve closed
6/18/2010	4:48:39 PM	BCl3 valve closed
6/18/2010	4:48:39 PM	PH3 valve closed
6/18/2010	4:48:39 PM	SiCl4 pre valve closed
6/18/2010	4:48:39 PM	SiCl4 post valve closed
6/18/2010	4:48:39 PM	Main Vac valve closed
6/18/2010	4:48:39 PM	Bypass valve closed
6/18/2010	4:48:39 PM	Bubbler valve closed
6/18/2010	4:48:39 PM	Helium MFC set to  0.000000
6/18/2010	4:48:39 PM	H2 MFC set to  0.000000
6/18/2010	4:48:39 PM	BCl3 MFC set to  0.000000
6/18/2010	4:48:39 PM	PHl3 MFC set to  0.000000
6/18/2010	4:48:39 PM	SiCl4 MFC set to  0.000000
6/18/2010	4:48:39 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	4:48:39 PM	Tube furnace set to 0
6/18/2010	4:48:54 PM	Helium valve closed
6/18/2010	4:48:54 PM	H2 valve closed
6/18/2010	4:48:54 PM	BCl3 valve closed
6/18/2010	4:48:54 PM	PH3 valve closed
6/18/2010	4:48:54 PM	SiCl4 pre valve closed
6/18/2010	4:48:54 PM	SiCl4 post valve closed
6/18/2010	4:48:54 PM	Main Vac valve closed
6/18/2010	4:48:54 PM	Bubbler valve closed
6/18/2010	4:48:54 PM	Bypass valve opened
6/18/2010	4:48:54 PM	Helium MFC set to  0.000000
6/18/2010	4:48:54 PM	H2 MFC set to  0.000000
6/18/2010	4:48:54 PM	BCl3 MFC set to  0.000000
6/18/2010	4:48:54 PM	PHl3 MFC set to  0.000000
6/18/2010	4:48:54 PM	SiCl4 MFC set to  0.000000
6/18/2010	4:48:54 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	4:48:54 PM	Tube furnace set to 0
6/18/2010	4:49:41 PM	Helium valve closed
6/18/2010	4:49:41 PM	H2 valve closed
6/18/2010	4:49:41 PM	BCl3 valve closed
6/18/2010	4:49:41 PM	PH3 valve closed
6/18/2010	4:49:41 PM	SiCl4 pre valve closed
6/18/2010	4:49:41 PM	SiCl4 post valve closed
6/18/2010	4:49:41 PM	Bubbler valve closed
6/18/2010	4:49:41 PM	Main Vac valve opened
6/18/2010	4:49:41 PM	Bypass valve opened
6/18/2010	4:49:41 PM	Helium MFC set to  0.000000
6/18/2010	4:49:41 PM	H2 MFC set to  0.000000
6/18/2010	4:49:41 PM	BCl3 MFC set to  0.000000
6/18/2010	4:49:41 PM	PHl3 MFC set to  0.000000
6/18/2010	4:49:42 PM	SiCl4 MFC set to  0.000000
6/18/2010	4:49:42 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	4:49:42 PM	Tube furnace set to 0
6/18/2010	4:54:42 PM	H2 valve closed
6/18/2010	4:54:42 PM	BCl3 valve closed
6/18/2010	4:54:42 PM	PH3 valve closed
6/18/2010	4:54:42 PM	SiCl4 pre valve closed
6/18/2010	4:54:42 PM	SiCl4 post valve closed
6/18/2010	4:54:42 PM	Main Vac valve closed
6/18/2010	4:54:42 PM	Bypass valve closed
6/18/2010	4:54:42 PM	Bubbler valve closed
6/18/2010	4:54:42 PM	Helium valve opened
6/18/2010	4:54:42 PM	Helium MFC set to  500.000000
6/18/2010	4:54:42 PM	H2 MFC set to  0.000000
6/18/2010	4:54:42 PM	BCl3 MFC set to  0.000000
6/18/2010	4:54:42 PM	PHl3 MFC set to  0.000000
6/18/2010	4:54:42 PM	SiCl4 MFC set to  0.000000
6/18/2010	4:54:42 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	4:54:42 PM	Tube furnace set to 0
6/18/2010	4:56:00 PM	Helium valve closed
6/18/2010	4:56:00 PM	H2 valve closed
6/18/2010	4:56:00 PM	BCl3 valve closed
6/18/2010	4:56:00 PM	PH3 valve closed
6/18/2010	4:56:00 PM	SiCl4 pre valve closed
6/18/2010	4:56:00 PM	SiCl4 post valve closed
6/18/2010	4:56:00 PM	Main Vac valve closed
6/18/2010	4:56:00 PM	Bypass valve closed
6/18/2010	4:56:00 PM	Bubbler valve closed
6/18/2010	4:56:00 PM	Helium MFC set to  0.000000
6/18/2010	4:56:00 PM	H2 MFC set to  0.000000
6/18/2010	4:56:00 PM	BCl3 MFC set to  0.000000
6/18/2010	4:56:00 PM	PHl3 MFC set to  0.000000
6/18/2010	4:56:00 PM	SiCl4 MFC set to  0.000000
6/18/2010	4:56:00 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	4:56:00 PM	Tube furnace set to 0
6/18/2010	4:56:15 PM	Helium valve closed
6/18/2010	4:56:15 PM	H2 valve closed
6/18/2010	4:56:15 PM	BCl3 valve closed
6/18/2010	4:56:15 PM	PH3 valve closed
6/18/2010	4:56:15 PM	SiCl4 pre valve closed
6/18/2010	4:56:15 PM	SiCl4 post valve closed
6/18/2010	4:56:15 PM	Main Vac valve closed
6/18/2010	4:56:15 PM	Bubbler valve closed
6/18/2010	4:56:15 PM	Bypass valve opened
6/18/2010	4:56:15 PM	Helium MFC set to  0.000000
6/18/2010	4:56:15 PM	H2 MFC set to  0.000000
6/18/2010	4:56:15 PM	BCl3 MFC set to  0.000000
6/18/2010	4:56:15 PM	PHl3 MFC set to  0.000000
6/18/2010	4:56:15 PM	SiCl4 MFC set to  0.000000
6/18/2010	4:56:15 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	4:56:15 PM	Tube furnace set to 0
6/18/2010	4:56:47 PM	Helium valve closed
6/18/2010	4:56:47 PM	H2 valve closed
6/18/2010	4:56:47 PM	BCl3 valve closed
6/18/2010	4:56:47 PM	PH3 valve closed
6/18/2010	4:56:47 PM	SiCl4 pre valve closed
6/18/2010	4:56:47 PM	SiCl4 post valve closed
6/18/2010	4:56:47 PM	Bubbler valve closed
6/18/2010	4:56:47 PM	Main Vac valve opened
6/18/2010	4:56:47 PM	Bypass valve opened
6/18/2010	4:56:47 PM	Helium MFC set to  0.000000
6/18/2010	4:56:47 PM	H2 MFC set to  0.000000
6/18/2010	4:56:47 PM	BCl3 MFC set to  0.000000
6/18/2010	4:56:47 PM	PHl3 MFC set to  0.000000
6/18/2010	4:56:47 PM	SiCl4 MFC set to  0.000000
6/18/2010	4:56:47 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	4:56:47 PM	Tube furnace set to 0
6/18/2010	5:01:47 PM	H2 valve closed
6/18/2010	5:01:47 PM	BCl3 valve closed
6/18/2010	5:01:47 PM	PH3 valve closed
6/18/2010	5:01:47 PM	SiCl4 pre valve closed
6/18/2010	5:01:47 PM	SiCl4 post valve closed
6/18/2010	5:01:47 PM	Main Vac valve closed
6/18/2010	5:01:47 PM	Bypass valve closed
6/18/2010	5:01:47 PM	Bubbler valve closed
6/18/2010	5:01:47 PM	Helium valve opened
6/18/2010	5:01:47 PM	Helium MFC set to  500.000000
6/18/2010	5:01:47 PM	H2 MFC set to  0.000000
6/18/2010	5:01:47 PM	BCl3 MFC set to  0.000000
6/18/2010	5:01:47 PM	PHl3 MFC set to  0.000000
6/18/2010	5:01:47 PM	SiCl4 MFC set to  0.000000
6/18/2010	5:01:47 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	5:01:48 PM	Tube furnace set to 0
6/18/2010	5:03:05 PM	Helium valve closed
6/18/2010	5:03:05 PM	H2 valve closed
6/18/2010	5:03:05 PM	BCl3 valve closed
6/18/2010	5:03:05 PM	PH3 valve closed
6/18/2010	5:03:05 PM	SiCl4 pre valve closed
6/18/2010	5:03:05 PM	SiCl4 post valve closed
6/18/2010	5:03:05 PM	Main Vac valve closed
6/18/2010	5:03:05 PM	Bypass valve closed
6/18/2010	5:03:05 PM	Bubbler valve closed
6/18/2010	5:03:05 PM	Helium MFC set to  0.000000
6/18/2010	5:03:05 PM	H2 MFC set to  0.000000
6/18/2010	5:03:05 PM	BCl3 MFC set to  0.000000
6/18/2010	5:03:05 PM	PHl3 MFC set to  0.000000
6/18/2010	5:03:05 PM	SiCl4 MFC set to  0.000000
6/18/2010	5:03:05 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	5:03:05 PM	Tube furnace set to 0
6/18/2010	5:03:20 PM	Helium valve closed
6/18/2010	5:03:20 PM	H2 valve closed
6/18/2010	5:03:20 PM	BCl3 valve closed
6/18/2010	5:03:20 PM	PH3 valve closed
6/18/2010	5:03:20 PM	SiCl4 pre valve closed
6/18/2010	5:03:20 PM	SiCl4 post valve closed
6/18/2010	5:03:20 PM	Main Vac valve closed
6/18/2010	5:03:20 PM	Bubbler valve closed
6/18/2010	5:03:20 PM	Bypass valve opened
6/18/2010	5:03:20 PM	Helium MFC set to  0.000000
6/18/2010	5:03:20 PM	H2 MFC set to  0.000000
6/18/2010	5:03:20 PM	BCl3 MFC set to  0.000000
6/18/2010	5:03:20 PM	PHl3 MFC set to  0.000000
6/18/2010	5:03:20 PM	SiCl4 MFC set to  0.000000
6/18/2010	5:03:20 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	5:03:20 PM	Tube furnace set to 0
6/18/2010	5:03:52 PM	Helium valve closed
6/18/2010	5:03:52 PM	H2 valve closed
6/18/2010	5:03:53 PM	BCl3 valve closed
6/18/2010	5:03:53 PM	PH3 valve closed
6/18/2010	5:03:53 PM	SiCl4 pre valve closed
6/18/2010	5:03:53 PM	SiCl4 post valve closed
6/18/2010	5:03:53 PM	Bubbler valve closed
6/18/2010	5:03:53 PM	Main Vac valve opened
6/18/2010	5:03:53 PM	Bypass valve opened
6/18/2010	5:03:53 PM	Helium MFC set to  0.000000
6/18/2010	5:03:53 PM	H2 MFC set to  0.000000
6/18/2010	5:03:53 PM	BCl3 MFC set to  0.000000
6/18/2010	5:03:53 PM	PHl3 MFC set to  0.000000
6/18/2010	5:03:53 PM	SiCl4 MFC set to  0.000000
6/18/2010	5:03:53 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	5:03:53 PM	Tube furnace set to 0
6/18/2010	5:08:53 PM	Helium valve closed
6/18/2010	5:08:53 PM	H2 valve closed
6/18/2010	5:08:53 PM	BCl3 valve closed
6/18/2010	5:08:53 PM	PH3 valve closed
6/18/2010	5:08:53 PM	SiCl4 pre valve closed
6/18/2010	5:08:53 PM	SiCl4 post valve closed
6/18/2010	5:08:53 PM	Bubbler valve closed
6/18/2010	5:08:53 PM	Main Vac valve opened
6/18/2010	5:08:53 PM	Bypass valve opened
6/18/2010	5:08:53 PM	Helium MFC set to  0.000000
6/18/2010	5:08:53 PM	H2 MFC set to  0.000000
6/18/2010	5:08:53 PM	BCl3 MFC set to  0.000000
6/18/2010	5:08:53 PM	PHl3 MFC set to  0.000000
6/18/2010	5:08:53 PM	SiCl4 MFC set to  0.000000
6/18/2010	5:08:53 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	5:08:53 PM	Tube furnace set to 0
6/18/2010	5:08:54 PM	Run finished at 5:08 PM
6/18/2010	5:08:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/18/2010	5:48:30 PM	Helium MFC set to  100.000000
6/18/2010	5:48:32 PM	Helium valve opened
6/18/2010	5:53:14 PM	Helium valve closed
6/18/2010	5:54:01 PM	Helium valve opened
6/18/2010	5:55:07 PM	Helium valve closed
6/18/2010	5:56:40 PM	Recipe started at 5:56 PM
6/18/2010	5:56:40 PM	Helium valve closed
6/18/2010	5:56:40 PM	BCl3 valve closed
6/18/2010	5:56:40 PM	PH3 valve closed
6/18/2010	5:56:40 PM	SiCl4 pre valve closed
6/18/2010	5:56:40 PM	SiCl4 post valve closed
6/18/2010	5:56:40 PM	Main Vac valve closed
6/18/2010	5:56:40 PM	Bypass valve closed
6/18/2010	5:56:40 PM	Bubbler valve closed
6/18/2010	5:56:40 PM	H2 valve opened
6/18/2010	5:56:40 PM	Helium MFC set to  0.000000
6/18/2010	5:56:40 PM	H2 MFC set to  500.000000
6/18/2010	5:56:40 PM	BCl3 MFC set to  0.000000
6/18/2010	5:56:40 PM	PHl3 MFC set to  0.000000
6/18/2010	5:56:40 PM	SiCl4 MFC set to  0.000000
6/18/2010	5:56:40 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	5:56:40 PM	Tube furnace set to 0
6/18/2010	5:57:59 PM	Helium valve closed
6/18/2010	5:57:59 PM	BCl3 valve closed
6/18/2010	5:57:59 PM	PH3 valve closed
6/18/2010	5:57:59 PM	SiCl4 pre valve closed
6/18/2010	5:57:59 PM	SiCl4 post valve closed
6/18/2010	5:57:59 PM	Main Vac valve closed
6/18/2010	5:57:59 PM	Bypass valve closed
6/18/2010	5:57:59 PM	H2 valve opened
6/18/2010	5:57:59 PM	Bubbler valve opened
6/18/2010	5:57:59 PM	Helium MFC set to  0.000000
6/18/2010	5:57:59 PM	H2 MFC set to  500.000000
6/18/2010	5:57:59 PM	BCl3 MFC set to  0.000000
6/18/2010	5:57:59 PM	PHl3 MFC set to  0.000000
6/18/2010	5:57:59 PM	SiCl4 MFC set to  0.000000
6/18/2010	5:57:59 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	5:57:59 PM	Tube furnace set to 1000
6/18/2010	6:17:59 PM	Helium valve closed
6/18/2010	6:17:59 PM	BCl3 valve closed
6/18/2010	6:17:59 PM	PH3 valve closed
6/18/2010	6:17:59 PM	Main Vac valve closed
6/18/2010	6:17:59 PM	Bypass valve closed
6/18/2010	6:17:59 PM	H2 valve opened
6/18/2010	6:17:59 PM	SiCl4 pre valve opened
6/18/2010	6:17:59 PM	SiCl4 post valve opened
6/18/2010	6:17:59 PM	Bubbler valve opened
6/18/2010	6:17:59 PM	Helium MFC set to  0.000000
6/18/2010	6:17:59 PM	H2 MFC set to  500.000000
6/18/2010	6:17:59 PM	BCl3 MFC set to  0.000000
6/18/2010	6:17:59 PM	PHl3 MFC set to  0.000000
6/18/2010	6:17:59 PM	SiCl4 MFC set to  50.000000
6/18/2010	6:17:59 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	6:17:59 PM	Tube furnace set to 1000
6/18/2010	6:37:59 PM	H2 valve closed
6/18/2010	6:37:59 PM	BCl3 valve closed
6/18/2010	6:37:59 PM	PH3 valve closed
6/18/2010	6:37:59 PM	SiCl4 pre valve closed
6/18/2010	6:37:59 PM	SiCl4 post valve closed
6/18/2010	6:37:59 PM	Main Vac valve closed
6/18/2010	6:37:59 PM	Bypass valve closed
6/18/2010	6:37:59 PM	Helium valve opened
6/18/2010	6:37:59 PM	Bubbler valve opened
6/18/2010	6:37:59 PM	Helium MFC set to  500.000000
6/18/2010	6:37:59 PM	H2 MFC set to  0.000000
6/18/2010	6:37:59 PM	BCl3 MFC set to  0.000000
6/18/2010	6:37:59 PM	PHl3 MFC set to  0.000000
6/18/2010	6:37:59 PM	SiCl4 MFC set to  0.000000
6/18/2010	6:37:59 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	6:37:59 PM	Tube furnace set to 0
6/18/2010	6:57:59 PM	Helium valve closed
6/18/2010	6:57:59 PM	H2 valve closed
6/18/2010	6:57:59 PM	BCl3 valve closed
6/18/2010	6:57:59 PM	PH3 valve closed
6/18/2010	6:57:59 PM	SiCl4 pre valve closed
6/18/2010	6:57:59 PM	SiCl4 post valve closed
6/18/2010	6:57:59 PM	Main Vac valve closed
6/18/2010	6:57:59 PM	Bypass valve closed
6/18/2010	6:57:59 PM	Bubbler valve closed
6/18/2010	6:57:59 PM	Helium MFC set to  0.000000
6/18/2010	6:57:59 PM	H2 MFC set to  0.000000
6/18/2010	6:57:59 PM	BCl3 MFC set to  0.000000
6/18/2010	6:57:59 PM	PHl3 MFC set to  0.000000
6/18/2010	6:57:59 PM	SiCl4 MFC set to  0.000000
6/18/2010	6:57:59 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	6:58:00 PM	Tube furnace set to 0
6/18/2010	6:58:00 PM	Run finished at 6:58 PM
6/18/2010	7:42:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/18/2010	7:42:30 PM	Recipe started at 7:42 PM
6/18/2010	7:42:30 PM	Helium valve closed
6/18/2010	7:42:30 PM	H2 valve closed
6/18/2010	7:42:30 PM	BCl3 valve closed
6/18/2010	7:42:30 PM	PH3 valve closed
6/18/2010	7:42:30 PM	SiCl4 pre valve closed
6/18/2010	7:42:30 PM	SiCl4 post valve closed
6/18/2010	7:42:30 PM	Main Vac valve closed
6/18/2010	7:42:30 PM	Bubbler valve closed
6/18/2010	7:42:30 PM	Bypass valve opened
6/18/2010	7:42:30 PM	Helium MFC set to  0.000000
6/18/2010	7:42:30 PM	H2 MFC set to  0.000000
6/18/2010	7:42:30 PM	BCl3 MFC set to  0.000000
6/18/2010	7:42:30 PM	PHl3 MFC set to  0.000000
6/18/2010	7:42:30 PM	SiCl4 MFC set to  0.000000
6/18/2010	7:42:30 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	7:42:30 PM	Tube furnace set to 0
6/18/2010	7:43:18 PM	Helium valve closed
6/18/2010	7:43:18 PM	H2 valve closed
6/18/2010	7:43:18 PM	BCl3 valve closed
6/18/2010	7:43:18 PM	PH3 valve closed
6/18/2010	7:43:18 PM	SiCl4 pre valve closed
6/18/2010	7:43:18 PM	SiCl4 post valve closed
6/18/2010	7:43:18 PM	Bubbler valve closed
6/18/2010	7:43:18 PM	Main Vac valve opened
6/18/2010	7:43:18 PM	Bypass valve opened
6/18/2010	7:43:18 PM	Helium MFC set to  0.000000
6/18/2010	7:43:18 PM	H2 MFC set to  0.000000
6/18/2010	7:43:18 PM	BCl3 MFC set to  0.000000
6/18/2010	7:43:18 PM	PHl3 MFC set to  0.000000
6/18/2010	7:43:18 PM	SiCl4 MFC set to  0.000000
6/18/2010	7:43:18 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	7:43:19 PM	Tube furnace set to 0
6/18/2010	7:43:19 PM	Run finished at 7:43 PM
6/18/2010	7:43:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/18/2010	7:43:38 PM	Helium MFC set to  100.000000
6/18/2010	7:43:40 PM	Helium valve opened
6/18/2010	7:44:39 PM	Helium valve closed
6/18/2010	7:44:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/18/2010	7:45:05 PM	Recipe started at 7:45 PM
6/18/2010	7:45:05 PM	H2 valve closed
6/18/2010	7:45:05 PM	BCl3 valve closed
6/18/2010	7:45:05 PM	PH3 valve closed
6/18/2010	7:45:05 PM	SiCl4 pre valve closed
6/18/2010	7:45:05 PM	SiCl4 post valve closed
6/18/2010	7:45:05 PM	Main Vac valve closed
6/18/2010	7:45:05 PM	Bypass valve closed
6/18/2010	7:45:05 PM	Bubbler valve closed
6/18/2010	7:45:05 PM	Helium valve opened
6/18/2010	7:45:05 PM	Helium MFC set to  500.000000
6/18/2010	7:45:05 PM	H2 MFC set to  0.000000
6/18/2010	7:45:05 PM	BCl3 MFC set to  0.000000
6/18/2010	7:45:05 PM	PHl3 MFC set to  0.000000
6/18/2010	7:45:05 PM	SiCl4 MFC set to  0.000000
6/18/2010	7:45:05 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	7:45:05 PM	Tube furnace set to 0
6/18/2010	7:46:25 PM	Helium valve closed
6/18/2010	7:46:25 PM	H2 valve closed
6/18/2010	7:46:25 PM	BCl3 valve closed
6/18/2010	7:46:25 PM	PH3 valve closed
6/18/2010	7:46:25 PM	SiCl4 pre valve closed
6/18/2010	7:46:25 PM	SiCl4 post valve closed
6/18/2010	7:46:25 PM	Main Vac valve closed
6/18/2010	7:46:25 PM	Bypass valve closed
6/18/2010	7:46:25 PM	Bubbler valve closed
6/18/2010	7:46:25 PM	Helium MFC set to  0.000000
6/18/2010	7:46:25 PM	H2 MFC set to  0.000000
6/18/2010	7:46:25 PM	BCl3 MFC set to  0.000000
6/18/2010	7:46:25 PM	PHl3 MFC set to  0.000000
6/18/2010	7:46:25 PM	SiCl4 MFC set to  0.000000
6/18/2010	7:46:25 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	7:46:25 PM	Tube furnace set to 0
6/18/2010	7:46:40 PM	Helium valve closed
6/18/2010	7:46:40 PM	H2 valve closed
6/18/2010	7:46:40 PM	BCl3 valve closed
6/18/2010	7:46:40 PM	PH3 valve closed
6/18/2010	7:46:40 PM	SiCl4 pre valve closed
6/18/2010	7:46:40 PM	SiCl4 post valve closed
6/18/2010	7:46:40 PM	Main Vac valve closed
6/18/2010	7:46:40 PM	Bubbler valve closed
6/18/2010	7:46:40 PM	Bypass valve opened
6/18/2010	7:46:40 PM	Helium MFC set to  0.000000
6/18/2010	7:46:40 PM	H2 MFC set to  0.000000
6/18/2010	7:46:40 PM	BCl3 MFC set to  0.000000
6/18/2010	7:46:40 PM	PHl3 MFC set to  0.000000
6/18/2010	7:46:40 PM	SiCl4 MFC set to  0.000000
6/18/2010	7:46:40 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	7:46:40 PM	Tube furnace set to 0
6/18/2010	7:47:13 PM	Helium valve closed
6/18/2010	7:47:13 PM	H2 valve closed
6/18/2010	7:47:13 PM	BCl3 valve closed
6/18/2010	7:47:13 PM	PH3 valve closed
6/18/2010	7:47:13 PM	SiCl4 pre valve closed
6/18/2010	7:47:13 PM	SiCl4 post valve closed
6/18/2010	7:47:13 PM	Bubbler valve closed
6/18/2010	7:47:13 PM	Main Vac valve opened
6/18/2010	7:47:13 PM	Bypass valve opened
6/18/2010	7:47:13 PM	Helium MFC set to  0.000000
6/18/2010	7:47:13 PM	H2 MFC set to  0.000000
6/18/2010	7:47:13 PM	BCl3 MFC set to  0.000000
6/18/2010	7:47:13 PM	PHl3 MFC set to  0.000000
6/18/2010	7:47:13 PM	SiCl4 MFC set to  0.000000
6/18/2010	7:47:13 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	7:47:13 PM	Tube furnace set to 0
6/18/2010	7:52:13 PM	H2 valve closed
6/18/2010	7:52:13 PM	BCl3 valve closed
6/18/2010	7:52:13 PM	PH3 valve closed
6/18/2010	7:52:13 PM	SiCl4 pre valve closed
6/18/2010	7:52:13 PM	SiCl4 post valve closed
6/18/2010	7:52:13 PM	Main Vac valve closed
6/18/2010	7:52:13 PM	Bypass valve closed
6/18/2010	7:52:13 PM	Bubbler valve closed
6/18/2010	7:52:13 PM	Helium valve opened
6/18/2010	7:52:13 PM	Helium MFC set to  500.000000
6/18/2010	7:52:13 PM	H2 MFC set to  0.000000
6/18/2010	7:52:13 PM	BCl3 MFC set to  0.000000
6/18/2010	7:52:13 PM	PHl3 MFC set to  0.000000
6/18/2010	7:52:13 PM	SiCl4 MFC set to  0.000000
6/18/2010	7:52:13 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	7:52:13 PM	Tube furnace set to 0
6/18/2010	7:53:32 PM	Helium valve closed
6/18/2010	7:53:32 PM	H2 valve closed
6/18/2010	7:53:32 PM	BCl3 valve closed
6/18/2010	7:53:32 PM	PH3 valve closed
6/18/2010	7:53:32 PM	SiCl4 pre valve closed
6/18/2010	7:53:32 PM	SiCl4 post valve closed
6/18/2010	7:53:32 PM	Main Vac valve closed
6/18/2010	7:53:32 PM	Bypass valve closed
6/18/2010	7:53:32 PM	Bubbler valve closed
6/18/2010	7:53:32 PM	Helium MFC set to  0.000000
6/18/2010	7:53:32 PM	H2 MFC set to  0.000000
6/18/2010	7:53:32 PM	BCl3 MFC set to  0.000000
6/18/2010	7:53:32 PM	PHl3 MFC set to  0.000000
6/18/2010	7:53:32 PM	SiCl4 MFC set to  0.000000
6/18/2010	7:53:32 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	7:53:32 PM	Tube furnace set to 0
6/18/2010	7:53:47 PM	Helium valve closed
6/18/2010	7:53:47 PM	H2 valve closed
6/18/2010	7:53:47 PM	BCl3 valve closed
6/18/2010	7:53:47 PM	PH3 valve closed
6/18/2010	7:53:47 PM	SiCl4 pre valve closed
6/18/2010	7:53:47 PM	SiCl4 post valve closed
6/18/2010	7:53:47 PM	Main Vac valve closed
6/18/2010	7:53:47 PM	Bubbler valve closed
6/18/2010	7:53:47 PM	Bypass valve opened
6/18/2010	7:53:47 PM	Helium MFC set to  0.000000
6/18/2010	7:53:47 PM	H2 MFC set to  0.000000
6/18/2010	7:53:47 PM	BCl3 MFC set to  0.000000
6/18/2010	7:53:47 PM	PHl3 MFC set to  0.000000
6/18/2010	7:53:47 PM	SiCl4 MFC set to  0.000000
6/18/2010	7:53:47 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	7:53:47 PM	Tube furnace set to 0
6/18/2010	7:54:19 PM	Helium valve closed
6/18/2010	7:54:19 PM	H2 valve closed
6/18/2010	7:54:19 PM	BCl3 valve closed
6/18/2010	7:54:19 PM	PH3 valve closed
6/18/2010	7:54:19 PM	SiCl4 pre valve closed
6/18/2010	7:54:19 PM	SiCl4 post valve closed
6/18/2010	7:54:19 PM	Bubbler valve closed
6/18/2010	7:54:19 PM	Main Vac valve opened
6/18/2010	7:54:19 PM	Bypass valve opened
6/18/2010	7:54:19 PM	Helium MFC set to  0.000000
6/18/2010	7:54:19 PM	H2 MFC set to  0.000000
6/18/2010	7:54:19 PM	BCl3 MFC set to  0.000000
6/18/2010	7:54:19 PM	PHl3 MFC set to  0.000000
6/18/2010	7:54:19 PM	SiCl4 MFC set to  0.000000
6/18/2010	7:54:19 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	7:54:20 PM	Tube furnace set to 0
6/18/2010	7:59:20 PM	H2 valve closed
6/18/2010	7:59:20 PM	BCl3 valve closed
6/18/2010	7:59:20 PM	PH3 valve closed
6/18/2010	7:59:20 PM	SiCl4 pre valve closed
6/18/2010	7:59:20 PM	SiCl4 post valve closed
6/18/2010	7:59:20 PM	Main Vac valve closed
6/18/2010	7:59:20 PM	Bypass valve closed
6/18/2010	7:59:20 PM	Bubbler valve closed
6/18/2010	7:59:20 PM	Helium valve opened
6/18/2010	7:59:20 PM	Helium MFC set to  500.000000
6/18/2010	7:59:20 PM	H2 MFC set to  0.000000
6/18/2010	7:59:20 PM	BCl3 MFC set to  0.000000
6/18/2010	7:59:20 PM	PHl3 MFC set to  0.000000
6/18/2010	7:59:20 PM	SiCl4 MFC set to  0.000000
6/18/2010	7:59:20 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	7:59:20 PM	Tube furnace set to 0
6/18/2010	8:00:38 PM	Helium valve closed
6/18/2010	8:00:38 PM	H2 valve closed
6/18/2010	8:00:38 PM	BCl3 valve closed
6/18/2010	8:00:38 PM	PH3 valve closed
6/18/2010	8:00:38 PM	SiCl4 pre valve closed
6/18/2010	8:00:38 PM	SiCl4 post valve closed
6/18/2010	8:00:38 PM	Main Vac valve closed
6/18/2010	8:00:38 PM	Bypass valve closed
6/18/2010	8:00:38 PM	Bubbler valve closed
6/18/2010	8:00:38 PM	Helium MFC set to  0.000000
6/18/2010	8:00:38 PM	H2 MFC set to  0.000000
6/18/2010	8:00:38 PM	BCl3 MFC set to  0.000000
6/18/2010	8:00:38 PM	PHl3 MFC set to  0.000000
6/18/2010	8:00:38 PM	SiCl4 MFC set to  0.000000
6/18/2010	8:00:38 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	8:00:38 PM	Tube furnace set to 0
6/18/2010	8:00:53 PM	Helium valve closed
6/18/2010	8:00:53 PM	H2 valve closed
6/18/2010	8:00:53 PM	BCl3 valve closed
6/18/2010	8:00:53 PM	PH3 valve closed
6/18/2010	8:00:53 PM	SiCl4 pre valve closed
6/18/2010	8:00:53 PM	SiCl4 post valve closed
6/18/2010	8:00:53 PM	Main Vac valve closed
6/18/2010	8:00:53 PM	Bubbler valve closed
6/18/2010	8:00:53 PM	Bypass valve opened
6/18/2010	8:00:53 PM	Helium MFC set to  0.000000
6/18/2010	8:00:53 PM	H2 MFC set to  0.000000
6/18/2010	8:00:53 PM	BCl3 MFC set to  0.000000
6/18/2010	8:00:53 PM	PHl3 MFC set to  0.000000
6/18/2010	8:00:53 PM	SiCl4 MFC set to  0.000000
6/18/2010	8:00:53 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	8:00:53 PM	Tube furnace set to 0
6/18/2010	8:01:26 PM	Helium valve closed
6/18/2010	8:01:26 PM	H2 valve closed
6/18/2010	8:01:26 PM	BCl3 valve closed
6/18/2010	8:01:26 PM	PH3 valve closed
6/18/2010	8:01:26 PM	SiCl4 pre valve closed
6/18/2010	8:01:26 PM	SiCl4 post valve closed
6/18/2010	8:01:26 PM	Bubbler valve closed
6/18/2010	8:01:26 PM	Main Vac valve opened
6/18/2010	8:01:26 PM	Bypass valve opened
6/18/2010	8:01:26 PM	Helium MFC set to  0.000000
6/18/2010	8:01:26 PM	H2 MFC set to  0.000000
6/18/2010	8:01:26 PM	BCl3 MFC set to  0.000000
6/18/2010	8:01:26 PM	PHl3 MFC set to  0.000000
6/18/2010	8:01:26 PM	SiCl4 MFC set to  0.000000
6/18/2010	8:01:26 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	8:01:26 PM	Tube furnace set to 0
6/18/2010	8:06:26 PM	Helium valve closed
6/18/2010	8:06:26 PM	H2 valve closed
6/18/2010	8:06:26 PM	BCl3 valve closed
6/18/2010	8:06:26 PM	PH3 valve closed
6/18/2010	8:06:26 PM	SiCl4 pre valve closed
6/18/2010	8:06:26 PM	SiCl4 post valve closed
6/18/2010	8:06:26 PM	Bubbler valve closed
6/18/2010	8:06:26 PM	Main Vac valve opened
6/18/2010	8:06:26 PM	Bypass valve opened
6/18/2010	8:06:26 PM	Helium MFC set to  0.000000
6/18/2010	8:06:26 PM	H2 MFC set to  0.000000
6/18/2010	8:06:26 PM	BCl3 MFC set to  0.000000
6/18/2010	8:06:26 PM	PHl3 MFC set to  0.000000
6/18/2010	8:06:26 PM	SiCl4 MFC set to  0.000000
6/18/2010	8:06:26 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	8:06:26 PM	Tube furnace set to 0
6/18/2010	8:06:27 PM	Run finished at 8:06 PM
6/18/2010	8:06:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/18/2010	9:10:04 PM	Helium MFC set to  100.000000
6/18/2010	9:10:05 PM	Helium valve opened
6/18/2010	9:15:58 PM	Helium valve closed
6/18/2010	9:19:18 PM	Recipe started at 9:19 PM
6/18/2010	9:19:18 PM	Helium valve closed
6/18/2010	9:19:18 PM	BCl3 valve closed
6/18/2010	9:19:18 PM	PH3 valve closed
6/18/2010	9:19:18 PM	SiCl4 pre valve closed
6/18/2010	9:19:18 PM	SiCl4 post valve closed
6/18/2010	9:19:18 PM	Main Vac valve closed
6/18/2010	9:19:18 PM	Bypass valve closed
6/18/2010	9:19:18 PM	Bubbler valve closed
6/18/2010	9:19:18 PM	H2 valve opened
6/18/2010	9:19:18 PM	Helium MFC set to  0.000000
6/18/2010	9:19:18 PM	H2 MFC set to  500.000000
6/18/2010	9:19:18 PM	BCl3 MFC set to  0.000000
6/18/2010	9:19:18 PM	PHl3 MFC set to  0.000000
6/18/2010	9:19:18 PM	SiCl4 MFC set to  0.000000
6/18/2010	9:19:18 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	9:19:18 PM	Tube furnace set to 0
6/18/2010	9:20:38 PM	Helium valve closed
6/18/2010	9:20:38 PM	BCl3 valve closed
6/18/2010	9:20:38 PM	PH3 valve closed
6/18/2010	9:20:38 PM	SiCl4 pre valve closed
6/18/2010	9:20:38 PM	SiCl4 post valve closed
6/18/2010	9:20:38 PM	Main Vac valve closed
6/18/2010	9:20:38 PM	Bypass valve closed
6/18/2010	9:20:38 PM	H2 valve opened
6/18/2010	9:20:38 PM	Bubbler valve opened
6/18/2010	9:20:38 PM	Helium MFC set to  0.000000
6/18/2010	9:20:38 PM	H2 MFC set to  500.000000
6/18/2010	9:20:38 PM	BCl3 MFC set to  0.000000
6/18/2010	9:20:38 PM	PHl3 MFC set to  0.000000
6/18/2010	9:20:38 PM	SiCl4 MFC set to  0.000000
6/18/2010	9:20:38 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	9:20:38 PM	Tube furnace set to 1000
6/18/2010	9:40:38 PM	Helium valve closed
6/18/2010	9:40:38 PM	PH3 valve closed
6/18/2010	9:40:38 PM	Main Vac valve closed
6/18/2010	9:40:38 PM	Bypass valve closed
6/18/2010	9:40:38 PM	H2 valve opened
6/18/2010	9:40:38 PM	BCl3 valve opened
6/18/2010	9:40:38 PM	SiCl4 pre valve opened
6/18/2010	9:40:38 PM	SiCl4 post valve opened
6/18/2010	9:40:38 PM	Bubbler valve opened
6/18/2010	9:40:38 PM	Helium MFC set to  0.000000
6/18/2010	9:40:38 PM	H2 MFC set to  500.000000
6/18/2010	9:40:38 PM	BCl3 MFC set to  35.000000
6/18/2010	9:40:38 PM	PHl3 MFC set to  0.000000
6/18/2010	9:40:38 PM	SiCl4 MFC set to  50.000000
6/18/2010	9:40:38 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	9:40:38 PM	Tube furnace set to 1000
6/18/2010	10:00:38 PM	H2 valve closed
6/18/2010	10:00:38 PM	BCl3 valve closed
6/18/2010	10:00:38 PM	PH3 valve closed
6/18/2010	10:00:38 PM	SiCl4 pre valve closed
6/18/2010	10:00:38 PM	SiCl4 post valve closed
6/18/2010	10:00:38 PM	Main Vac valve closed
6/18/2010	10:00:38 PM	Bypass valve closed
6/18/2010	10:00:38 PM	Helium valve opened
6/18/2010	10:00:38 PM	Bubbler valve opened
6/18/2010	10:00:38 PM	Helium MFC set to  500.000000
6/18/2010	10:00:38 PM	H2 MFC set to  0.000000
6/18/2010	10:00:38 PM	BCl3 MFC set to  0.000000
6/18/2010	10:00:38 PM	PHl3 MFC set to  0.000000
6/18/2010	10:00:38 PM	SiCl4 MFC set to  0.000000
6/18/2010	10:00:38 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	10:00:38 PM	Tube furnace set to 0
6/18/2010	10:20:38 PM	Helium valve closed
6/18/2010	10:20:38 PM	H2 valve closed
6/18/2010	10:20:38 PM	BCl3 valve closed
6/18/2010	10:20:38 PM	PH3 valve closed
6/18/2010	10:20:38 PM	SiCl4 pre valve closed
6/18/2010	10:20:38 PM	SiCl4 post valve closed
6/18/2010	10:20:38 PM	Main Vac valve closed
6/18/2010	10:20:38 PM	Bypass valve closed
6/18/2010	10:20:38 PM	Bubbler valve closed
6/18/2010	10:20:38 PM	Helium MFC set to  0.000000
6/18/2010	10:20:38 PM	H2 MFC set to  0.000000
6/18/2010	10:20:38 PM	BCl3 MFC set to  0.000000
6/18/2010	10:20:38 PM	PHl3 MFC set to  0.000000
6/18/2010	10:20:38 PM	SiCl4 MFC set to  0.000000
6/18/2010	10:20:38 PM	Bypass solenoid MFC set to  0.000000
6/18/2010	10:20:39 PM	Tube furnace set to 0
6/18/2010	10:20:39 PM	Run finished at 10:20 PM
